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Ceramic

High temperature CVD furnace

Ceramic CVD Reactor

This is a high-temperature vacuum furnace in which a reaction muffle is placed inside a vertical graphite hot zone. Substrates or fibers of carbon-based materials are loaded on the turntable at the bottom of the muffle, evacuated, and then heated up to 1000 ~ 2400℃ while introducing the precursor gas into the muffle under partial pressure. Thereby, vapors such as PyC, SiC, B4C or TaC generates through thermal decomposition and reaction of the precursor gas are deposited as a thin film on the substrate or inside of the fiber.

Features

  • Hot zone appropriate for

    thermal CVD of high temp.

    up to 2400℃

  • Horizontal/vertical gas flow

    all available depending on

    loading conditions

  • Muffle, nozzle and piping

    structures of easy

    maintenance

  • Turn key supply of the entire

    line from gas delivery to the

    exhaust scrubber

  • Longer life of each
    component

    　

Ceramic CVD Standard specifications

Item Specification Item Specification
Fce type Vertical reactor furnace for high temp. CVD Retort muffle Polygonal cylinder assembly
Application Ceramic coating(CVD) or densification(CVI) Process gas [MTS, CH4, TaCl4, HfCl4, BCl3-NH3,] H2, N2, Ar
Film materials SiC, TaC, HfC, BN, (Pyrolitic) Carbon Process pressure Partial 5KPa ~ 50KPa
Loading volume 254L ~ 3532L Evacuation Mechanical booster pump & Dry pump
Temperature HT type : Max. 1600℃, UT type : Max. 2400℃ Loading Bottom door loading & rotating turn-table
Uniformity ±6~12℃[1000℃, no load, Vacuum] Door lock Hydraulic clamps
Heat-up rate 2 ~ 10℃/min Exhaust treatment Vapor trap & Particle filter & Scrubber
Temp. control Multi zone PID control by T/C and SCR System control PLC control, Touch or PC interface
Hot zone materials Graphite Electricity AC 3ph or DC

Ceramic CVD Standard dimension

Product File DOWNLOAD

- High temperature type(HT)_Max. 1600℃

Model code TVCVD-
HT0609		 TVCVD-
HT1015		 TVCVD-
HT1218		 TVCVD-
HT1520
Work zone(㎜) Φ600 * 900H Φ1000 * 1500H Φ1200 * 1800H Φ1500 * 2000H
Capacity(㎏) 200 ~ 300 Kg 550 ~ 700 Kg 750 ~ 1,000 Kg 1,000 ~ 1,300 Kg
Uniformity ±6℃ ±8℃ ±10℃ ±12℃
Electricity(kVA) 360 KVA 600 KVA 750 KVA 1,000 KVA

- Ultra high temperature type(UT)_Max. 2400℃

모델명 TVCVD-
UT0609		 TVCVD-
UT1015		 TVCVD-
UT1218		 TVCVD-
UT1520
Work zone(㎜) Φ600 * 900H Φ1000 * 1500H Φ1200 * 1800H Φ1500 * 2000H
Capacity(㎏) 200 ~ 300 Kg 550 ~ 700 Kg 750 ~ 1,000 Kg 1,000 ~ 1,300 Kg
Uniformity ±6℃ ±8℃ ±10℃ ±12℃
Electricity(kVA) 540 KVA 940 KVA 1,140 KVA 1,440 KVA