ThermVac

Firing Service

Fabrication of CVD samples

Fabrication of CVD samples

We have expensive special vacuum furnaces for extreme processes in-house to
respond to customers' requests for process testing, specimen production, or firing services.

Fabrication of CVD samples

Our services

  • Fabrication of CVD samples such as SiC, TaC, PyC, or B4C

Furnace specifications

Item Specification Item Specification
Max. operating temp. 2400℃ Work zone Φ400 * 600H ㎜
Process gases Precursors, CH4, Cl2, H2, Argon, N2 Coating film materials SiC, TaC, B4C, PyC, etc.
Pressure range 0.01 Torr ~ 760 Torr Partial control 10 ~ 500 Torr

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