Positive energy of our members aims at the best service for customers,
and joyful company culture inspires the will to work.

  • 2013 ~ 2019

    2019 y

    Export of carbon purification furnace

    2018 y

    Development of multi-chamber fce

    Development of HT CVD for SiC crystal

    2016 y

    Development of SiC single crystal fce

    2015 y

    Development of CVD for TaC coating

    2014 y

    Overseas expansion to China

  • 2012 ~ 2001

    2012 y

    Development of SiC CVD reactor

    2010 y

    Development of GPS

    2008 y

    Recruit of Japanese technical adviser

    2007 y

    Overseas expansion to Japan

    2005 y

    Establishment of R&D institute

  • 1993 ~ 2000

    2000 y

    Change to manufacturing business

    1993 y

    Foundation of offer business